The 2009 Lithography Workshop
(formally the IEEE Lithography Workshop)

Welcome to the Home Page of The Lithography Workshop!
The 2009 Meeting will be held at the world famous Coeur d’Alene Resort,
in Coeur d’Alene, Idaho June 28-July 2, 2009
The resort is 30 miles from the Spokane, WA airport.

Papers from International experts on:
Advanced Optical Lithography
Computational Lithography
EUV-Lithography
3-D Integration and Packaging
Mask and Resist Technology
Metrology for Lithography
Nano-Imprint Lithography

The Technical Program Chairs for this meeting are Frank Schellenberg (Mentor Graphics) and Bruno LaFontaine (AMD). The Site Chair is Keith Standiford (KLA-Tencor).

The calendar of events for this conference is:
May 15, 2008                         Announcement of Site
September 1, 2009                 Announcement of Section Chairs
February 1, 2009                    Preliminary Technical Program
April 15, 2009                        Conference Registration Opens
May 1, 2009                           Abstract Submission by Authors
May 1, 2009                           Cut-off date for submission of Abstracts for Poster Session
June 1, 2009                           Final Technical Program with Abstracts On-Line
June 10, 2009                         Hotel Conference Rate Cut-Off Date

The website will be updated periodically as needed.

As in previous meetings, we have arranged for the hotel to extend the conference rate for 3 days before (arriving the evening of June 24th) and up to 3 days after the conference (leaving July 7th) as available. This will allow our attendees to spend the July 4th weekend at the resort, where firework displays over the Coeur d’Alene Lake are a yearly event. To make your reservations, you should contact the Resort directly at their Reservation Department, (800) 688-5253. You will need to mention “The Lithography Workshop” to obtain the conference rates. ($209/night)

If you have questions regarding the Technical Program or Poster Sessions, please contact either Frank Schellenberg (frank_schellenberg@mentor.com) or Bruno La Fontaine (bruno.lafontaine@globalfoundries.com).  If you have questions regarding the site, please contact Keith Standiford (keith.standiford@kla-tencor.com).  For conference registration questions, please contact Ken Harrison (ken.harrison1@verizon.net).

We hope that you can join us. We expect the technical program to be outstanding and the site to be inspiring.