Technical Program Chairs
Dr. Anton DeVilliers, Director of Patterning Technology, Tokyo Electron America
Anton DeVilliers, born in Oregon, moved to South Africa with his family where he completed his undergraduate degree in Physics and Solid State Physics at the University of Cape Town. After returning to America, he completed his studies at the Oregon Center for Optics at University of Oregon. His professional career began at Hyundai Semiconductor in Eugene, Oregon which later became Hynix. Afterwards, he held Lithography R&D Area manager positions at Maxim, Cypress Semiconductor, and then at Micron where he led the lithography technology team having responsibilities for optical and chemical lithography R&D. He holds numerous patents including pitch quadrupling and double patterning technologies. At TEL as Director of Patterning Technology he is responsible for advanced lithography and patterning pathfinding. His work at TEL includes logic scaling analysis with the development of many scaling boosters and patterning strategies to extend scaling through integration.
Dr. Linyong (Leo) Pang, Chief Product Office and Executive Vice President
at D2S, Inc
Dr. Linyong (Leo) Pang is currently the Chief Product Office and Executive Vice President at D2S, Inc.. Prior to D2S, Dr. Pang was the GM and the only Sr. Vice President of Luminescent Technologies. Dr. Pang joined the Luminescent’s executive team from its beginning in 2004 and has played leadership roles with products, technologies, marketing, and customers until its final acquisition by KLA-Tencor, he is mostly known as the person that brings curvilinear ILT (Inverse Lithography Technology, which he coined the acronym) into lithography and photomask world. He created and was the GM of the Computational Lithography division (acquired by Synopsys in 2012) and Computational Metrology and Inspection (acquired by KLA-Tencor in March 2014). His pioneering work in EDA and Semiconductor started back 1999, and as the inventor of Numerical Tech’s i- Virtual Stepper System, which was given the "2001 Editors Choice Best Product Award" by Semiconductor International. Prior to joining Luminescent, Dr. Pang held several product development and marketing management positions at Numerical and Synopsys (after acquisition), and research scientist position at Acuson. Dr. Pang has 38 issued patents, 27 pending patents, and 81 publications. Dr. Pang received his Ph.D. in Mechanical Engineering and additional M.S. in Computer Science from Stanford University.