Keynotes

Jos Benschop – ASML

Abstract: Quo Vadis EUV Lithography

Dr. Benschop
Dr. Benschop received his M.Sc. (cum laude) and PhD in physics from University of Twente.
From 1984 until 1997 he worked at Philips Research Labs in Eindhoven as well as Sunnyvale (CA-USA). He joined ASML in 1997 where he started the ASML program on EUV Lithography. As Senior Vice President Technology he is currently responsible for Research, System Engineering and the Technology Development Center.
Dr. Benschop published over 35 papers and is (co-)inventor of more than 20 patents.
He is a member of the Netherlands Academy of Engineering, a fellow of the SPIE and has been appointed by the King of The Netherlands as advisor to Dutch government and parliament for Science, Technology and Innovation.

 

 

Susan S. Margulies

Dr. Susan S. Margulies
Dr. Susan S. Margulies leads the U.S. National Science Foundation’s Directorate for Engineering in its mission to transform our world for a better tomorrow by driving discovery, inspiring innovation, enriching education, and accelerating access. With an annual budget of nearly $800 million, the NSF’s Engineering Directorate provides over 40 percent of federal funding for fundamental research in engineering at academic institutions, and it distributes more than 1500 awards supporting research and education each year. Projects funded by the Engineering Directorate span frontier research to generate new knowledge, problem-driven research to identify new solutions to societal challenges, and application-driven research to translate discoveries to uses that benefit society.
Margulies joined the NSF as the assistant director for the Directorate for Engineering in August 2021 after leading the Wallace H. Coulter Department of Biomedical Engineering at the Georgia Institute of Technology and Emory University. While on detail at the NSF, she is a professor and Georgia Research Alliance Eminent Scholar at Georgia Tech and Emory. She received her B.S.E. in mechanical and aerospace engineering at Princeton University, her Ph.D. in bioengineering from the University of Pennsylvania, and post-doctoral training at the Mayo Clinic. She joined the faculty at the University of Pennsylvania in 1993 as an assistant professor, rising through the ranks to professor. In 2017 she became the first faculty member tenured in both the Georgia Institute of Technology and Emory University, and she was a department chair in both the college of engineering at Georgia Tech and Emory’s school of medicine.
Margulies is internationally recognized for pioneering studies spanning the micro-to-macro scales and across species to identify mechanisms underlying brain injuries in children and adolescents and lung injuries associated with mechanical ventilation, leading to improved injury prevention, diagnosis and treatments. She has launched numerous training and mentorship programs for students and faculty, created institute-wide initiatives to enhance diversity and inclusion, and led innovative projects in engineering education.
Margulies’ transdisciplinary scholarly impact has been recognized by her election as fellow of the American Society of Mechanical Engineers, the Biomedical Engineering Society, and the American Institute for Medical and Biological Engineering, and as a member of the National Academy of Engineering and the National Academy of Medicine.

 

 

Nitin J. Shah

Abstract: Innovation and Growth of the Global Semiconductor Industry

Nitin J. Shah
Nitin J. Shah is an innovator, with over 35 years of experience in technology development, corporate and product strategy, marketing, and business development.
Currently Nitin is Principal Innovator at MITRE Engenuity, a not-for-profit tech foundation for the public good, and is based in Silicon Valley. He is a leading architect of the MITRE Engenuity proposal for the National Semiconductor Technology Center and worked with corporations, start-ups, academia and financial institutions, to craft a position in support of the CHIPS Act and the resurgence of the US semiconductor industry.
Previously, he orchestrated the successful proposal to NASA for an award to Nokia for deployment of first ever 4G/LTE network on the lunar surface. Nitin was in Nokia’s Tech Ventures initiative, to commercialize IP and technology from Bell Labs via partners and incubators.
Nitin’s career spans AT&T Bell Labs, Lucent Technologies, Nokia Bell Labs, several start-ups, and providing consulting and decision services for clients such as DoCoMo, Ericsson, and Intel. He has expertise in mobile networking, digital media, consumer privacy and semiconductors.
He serves on the Board of the Licensing Executives Society, Silicon Valley Chapter, and has been an enthusiastic mentor to founders and start-ups in the areas of cybersecurity and identity management, mobility AI/analytics for infrastructure and urban planning, datacenter cooling, a design studio for complex r.f. and filter solutions, and next gen wireless infrastructure platforms.
Nitin has a BA and MA in Natural Sciences and a PhD in Microelectronics from the University of Cambridge in England, and a still incomplete Executive MBA from the University of Pittsburgh.
Fun facts: Nitin is the sole inventor on a family of patents for “Airplane Mode”.
He has an h-index of 17.
He was born on the equator at an altitude of 2360 meters in a town with fewer than 3000 people.