Announcing: 2012 Lithography Workshop
Welcome to the 21st Lithography Workshop which is being held June 24 through June 28, 2012 in Colonial Williamsburg, Virginia. With the support of its members, the Lithography Workshop has sponsored a unique program which is carefully designed to cover the latest lithography-related advancements to benefit all participants in their field of expertise. The Workshop held its first meeting in Lake Placid, New York in 1981. The 2011 Workshop is the 21st in a series of meetings that span 31 years promoting the continuing evolution of lithography. The speakers at the Workshop are selected by invitation and represent a broad range of disciplines and covering a wide array of different lithography approaches and requirements. The Workshop is limited to 150 participants. Should you be interested in attending or wish to be added to our mailing list, please contact our Registration Chairman, Ken Harrison (ken.harrison1@verizon.net).
The Workshop is modeled to be similar to a “Gordon-Research” meeting but with the intent of addressing more immediate issues facing the lithography community within the next 3-5 years. The attendees of the Workshop share recent advances and knowledge in lithography with others in the community. The Workshop provides an environment where leading researchers from various disciplines can share their thoughts and ideas. A primary intent is to provide an arena for stimulating debate and the meeting schedule is designed to provide the attendees time for side-meetings and discussions. The Workshop has historically focused on leading-edge semiconductor applications, but has also addressed the challenging lithography needs of flat panel displays, memory devices and 3-dimesnional device integration.
2012 has the potential to be an important decision point for a number of advanced lithography programs. The relative strengths and weaknesses of these lithography approaches and various alternative technologies will be discussed and analyzed in detail.
This is an opportunity for attendees to meet with world-renown investigators and discuss topics of mutual interest. The Workshop format is intended to provide an atmosphere for in-depth discussions of the invited and poster papers presented. This is accomplished by providing time for extensive questions and answers after each paper, during the poster programs and during group meetings. This year, we will continue with our very successful Poster Session to present additional, late-breaking topics of interest. If you are interested in presenting a Poster Paper, please contact the Technical Program Chairs, Dr. Mordechai Rothschild of Lincoln Laboratories (rothschild@ll.mit.edu) and Dr. Lars Liebman of IBM (lliebman@us.ibm.com).
As in the past, there will be no formal proceedings, picture taking, audio or video recording of the Workshop presentations. However, authors will have the opportunity to voluntarily publish their presentations on the Lithography Workshop Website. The technical sessions have been scheduled for mornings and evenings, with time for meetings between attendees and authors during the afternoon.
The Executive Committee is arranging a program that we believe you will find intellectually stimulating and challenging. Putting together a meeting such as this required the contributions of many people. We are especially thankful to the Technical Program Chairpersons and the Session Chairs who have put together the program. This year, the Technical Program Chairs are Dr. Mordechai Rothschild of Lincoln Laboratories and Dr. Lars Liebman of IBM. Each talk is invited and each speaker is recognized for his/her outstanding work in their field. We hope that you will avail yourself to all the sessions and functions that the organizers have planned.
This year, the Workshop will be held at the Colonial Williamsburg Lodge, in Williamsburg, VA. The facility is located near a number of airports and we hope you will find the atmosphere helpful in your discussions with other members of the lithography community.
As in previous years, we have arranged with the hotel to honor the conference rate for 3 days prior to, and after, the meeting on a space-available basis. Hence, the conference rates will be available from arriving as early as Friday, June 22, 2012 and leaving as late as on Sunday, July 1. To make your reservations, please see the “Accommodations” Tab. When making a reservation, please identify yourself as a member of “The Lithography Workshop”.
To preserve the Workshop atmosphere, the attendance is limited to 150 attendees. If you intend to attend, we encourage you to register in advance for both the conference (contact Ken Harrison at ken.harrison1@verizon.net) and the hotel. You can register for the meeting by going to the “Registration” tab. If you would like to attend or would like to be put on our mailing list, please contact registration chairmen Ken Harrison so that you can be added to our mailing list. The Executive Committee welcomes your comments and suggestions to better serve the lithography community.
Andrew M. Hawryluk, Ph.D.
President of the Executive Committee