The 2010 Lithography Workshop
(Formally the IEEE Lithography Workshop)

Note: If you are looking for reprints of papers from the earlier meetings, please select the “Past Conferences” tab at the lower left.

Welcome to the Home Page of the Lithography Workshop!
The 2010 meeting will be held at the Marriott Kauai Resort in Lihue, Kauai.
Meeting Dates are November 7 through November 11, 2010.
The hotel is 5 minutes from the Lihue airport and hotel shuttles are available.

Papers from international experts on:
Advanced Optical Lithography
Computational Lithography
EUV-Lithography
3-D Integration and Packaging
Mask and Resist Technology
Metrology for Lithography
Nano-Imprint Lithography
Self-Assembly Technologies

The Technical Chairs for this meeting are:
 Vivik Singh (Intel) and Michael Fritze (DARPA).

The calendar of events for this meeting is:

September 1, 2009                    Announcement of site and Program Chairs
April 15, 2010                           Announcement of Technical Section Chairs
July 1, 2010                              Preliminary Technical Program
July 1, 2010                              Conference Registration Opens
September 15, 2010                  Abstracts for Poster Papers Due
September 15, 2010                  Abstracts of Invited Papers Due
October 1, 2010                        Final Technical Program On Line
October 22, 2010                      Cut-off Date For Hotel Discounted Rates

As in previous meetings, we have arranged for the hotel to extend the conference rate so that these discounted rates will be available from November 4 through 15, 2010. To make your reservations, you should contact Marriott Reservations (1-800-220-2925) and identify yourself as an attendee of the Lithography Workshop. The conference rate is $215/night. The cut-off date to receive the discounted hotel rate is October 22, 2010.

If you have questions regarding the Technical Program, the Poster Sessions or would like to contribute to the technical sessions through the technical program committee, please contact either Vivek Singh (vivek.singh@intel.com) or Mike Fritze (Michael.fritze@darpa.mil).

If you have questions regarding the site or would like to participate in the site work, please contact David Kyser (David_Kyser@amat.com). 

For conference registration questions, please contact Ken Harrison (ken.harrison1@verizon.net).

If you would like to become a sponsor, or have questions regarding sponsorship opportunities, please contact John Frankenthaler (FandF@att.net).

We hope that you can join us.

This website will be updated periodically as needed.